ASTRA Control System

The ASTRA Control System provides integrated control of all diffusion and LPCVD furnace system parameters. ASTRA is Ethernet-based using distributed control via a high-powered,

tube-level microcomputer and intuitive, process-logical software.

 

All ASTRA operations are accomplished through graphical and animated, touch screen access. Comprehensive data acquisition, logging and graphing provide real-time assessments for optimum process management.

 

Features

 

  • Microcomputer (per tube-level)

        Intel Core2Duo Processor.

        DDRII RAM.

        High capacity hard drive.

        Flash drive data transfer.

        Printer module.

        Microsoft Exel compatible.

 

  • Touch Screen 
    High-resolution.

        Fab-friendly touch even with cleanroom gloves.  

 

  • Temperature

        Multiple control loops.

        Spike TC, profile TC or cascade control.

        Auto profile or custom PID.

        Programmable temperature tolerancing.

        NIST offset program.

        Data acquisition, logging and graphing.

        0.1oC control resolution.

 

  • Gas, Fluids and Vacuum

        Multiple MFC control loops.

        Programmable flow tolerance monitor and alerts.

        Fault redirects with abort or branch.

        Interface programming of peripheral components.

        Comprehensive LPCVD vacuum control monitoring.

        LPCVD auto leak-test protocol.

        Hardware and firmware safety interlock.

 

  • Loading        

        Intelligent motor control.

        Programmable motion and feedback logic.

        End-of-travel sensing with next-step function.

        Over-travel sensing with fault redirects.

 

  • Power

        120/220/240VAC, 50 or 60 Hz with UPS

 

  • Example States and Functions

        Operation and programming.

        Navigate.

        Password management and access rights.

        Recipe editing.

        Temperature parameters.

        Gas/fluid parameters.

        Vacuum paramters.

        Loading parameters.

        Step times and event response editing.

        Calibrations.

        Alarm fault redirects.

        Hardwire relay logic and firmware interlocks.

 

Benefits

 

  • Precise control of temperature, gas and fluid flow, vacuum and loading parameters for optimum process performance and repeatability.

 

  • Intuitive programming and operation through graphical touch screen access for easy training and operation.

 

  • Tube-level microcomputer for high speed and masterful data management, which results in optimized yields and process tracking. 

 

  • Distributed control with full safety interlocks for gas flow, vacuum, temperature and loading, which provide safe, reliable operation.

 

  • Optimized temperature control with divisible cascading and auto profiling to setup and maintain optimum temperature parameters.

 

  • User permissions protocols assure only qualified personnel can access programming, recipes and parameters.

 

  • Comprehensive alerts, alarms, redirects and monitors
    for all parameters. Provides instant responses, reporting and recording of anything that affects process perfomance or safety.

 

  • Full maintenance accessibility with integral trouble-
    shooting and calibrations. Provides data for maintenance with no additional maintenance computer required.

 

  • Advanced LPCVD control and monitoring functions for
    sustained process repeatability.

 

  • On-screen keyboard for easy data entry.

 

  • Lot tracking/run history for multiple lots per run. Allows recipe tracking of wafers and wafer lots.

 

  • Retrofitable to most any furnace brand or model. Modernizes all control attributes at low cost. 

 

  • Optional ASTRA Host System. Provides centralized factory recipe management, downloading, data acquisition and logging for up to 99 tube-levels.

Example Operator Screen
Example Setup Screen
Example Data Log Chart
On Screen Keyboard
Example Screen with Pop-up Alert
Example Run Event Screen