RCH Associates diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life.
Furnace Cabinet:
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Unitized structural steel assembly
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Hinged, locking and removable element access doors
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Thermally insulated enclosure paneling
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High temperature Urethane coating
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Easy-to-adjust element alignment supports
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Cabinet overtemperature interlock sensor
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Leveling pads and optional seismic brackets
Toxic Gas Scavenger:
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Stainless steel construction
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Vents gases and heat from process tube or chamber
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Indepently adjustable exhaust draw per tube-level
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Cantilever closure or manual door sealing per tube-level
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LPCVD flange and gas line fitting mounting scheme
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Differential pressure gauge to monitor exhaust draw
Air-to-water Heat Exchanger:
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Used to vent heated air from furnace cabinet top
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HVAC control of furnace room
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Water-cooled, high efficiency radiator
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Air baffle paneling to direct air flow through cabinet
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Exhaust fan module for air exhaust draw
Power Distribution:
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Located within base of furnace cabinet
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Encloses transformers, terminals and wire bussing
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Encloses temperature controls and contactors/breakers
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Easy accessibility to components
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Pull down panels for easy access to control modules
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EMO safety controls
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Reduncant overtemperature interlock per element zone
Element Kits:
Low temperature range element 350 to 900oC
Mid temperature range element 600 to 1200oC
High temperature range element 600 to 1350oC
+/- 0.5oC tolerance 600 to 1350oC range
+/- 1.0oC tolerance 350 to 600oC range
Vacuum formed high purity alumina insulation
Stainless steel shroud
Helical windings with captive spacing
High purity alumina vestibule blocks
NEXTEL soft collars
Stainless steel capture rings, plates and collars
Power Controls:
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High efficiency digital SSR/SCR firing circuitry
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Power control and circuit protection with EMO
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NEC-grade wiring
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Easy accessibility to components
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Main and control power disconnect contactors
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Individual element power contactors and resets
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Illuminated power indicators
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Redundant overtemperature interlocks
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208, 380, 415, 480VAC main power, 50 or 60Hz