Processing Subsystems

 

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Processing subsystems are process-specific components that are installed at each tube-level of the furnace system. These may include the process tube or chamber, wafer carriers, the type of cantilever and injectors and baffles.

 

The size and form of the process tube or chamber has a direct effect on uniformity, growth or deposition rate and film quality. In addition, wafer boats, carriers and the cantilever or push/puller that reside in the chamber during processing may effect results. For certain atmospheric diffusion and LPCVD processes specialized gas and fluid injectors are required to properly distribute fluids and reactants.


An associated gas or fluid delivery system must be configured to properly and safely perform a specific process reaction. For LPCVD, proper vacuum pumps and vacuum control/monitoring devices must be implemented for effective process results and repeatability.

 

RCH Associates' processing subsystems include field-proven design features to assure the best process results avaialble. In addtion, keen attention is paid to how wafers are handled during loading and unloading.  Another key benefit is the maintainability and rugged simplicity of the design, which results in the high uptime and performance you would expect.

 

The following lists provide overviews of typical processing subsystem components.

Components for Atmospheric Processes      

 

  • Process tube

        Semiconductor-grade quartz glass

                                    or

        High purity silicon carbide (high temperatures)

        Sized according to substrate, process and element

        Domed with associated process-specific gas inlets

        Optional profile TC port

        Cantilever loading configuration option

                                    or

        Manual loading configuration option (quartz glass)

        Ground joint with end cap for manual loading option

  • Loading

        Cantilever load beam options:

            High purity silicon carbide paddle

                                    or

            Dual rods sheathed in quartz glass

        Push/puller or manual sled options:

            Tubing or rods

                                    or 

            Quartz glass tube with ceramic reinforcement 

        Peripheral quartz components for manual loading

 

         Click here for information on loaders

      

  • Boats or Wafer Sleds

        Quartz glass wafer boats

            Cantilever configuration

            Sled-type mono boat

                                    or

        High purity silicon carbide boats (high temperatures)

  • Optional profile TC
  • Fluid, Gas and Thermal Baffles

        Used for turbulence and fluid containment

        Quartz glass

                                    or

        High purity silicon carbide (high temperatures)

        Quartz wool thermal plug for heat containment

  • Gas or Gas/Fluid Delivery System

        Configured to process-specific gas schematic

        Mass flow controller or rotameter flow devices

        Internal or external torch for pyrogenic oxidation

        Liquid source delivery systems for:

                            POCl3

                            BBr3

                            DCE

                            Others

        Peripheral interconnect plumbing

 

        Click here for nformation on gas systems

        

        

        

        

        

 

        

        

 

     

Components for LPCVD Processes

 

  • Vacuum process chamber

        Sized according to substrate, process and element

        Quartz glass LPCVD tube

            Domed with vacuum pump port

            May be flanged or open at load port

                                or

                Open both ends for flanges

        RCH manual LPCVD flange

            Hinged vacuum sealing door

            May be water-cooled

            Seals flanged quartz glass LPCVD process tube

                                or

        RCH "Fast Flange"

            Load port and optional vacuum port assemblies

  • Optional profile TC with vacuum connections
  • Boats or Wafer Sleds

        Quartz glass wafer boats

            Cantilever configuration

            Sled-type mono boat

                                    or

        High purity silicon carbide boats (LPCVD poly)

        Quartz glass cageboats for processes such as:

                    LTO, PSG and BPSG

                    Insitu doped poly

                           Poly and amorphous silicon

  • Depletion compensting injectors

        Quartz glass with laser-drilled orfices

        For flat temperature processes such as:

                        LTO, PSG and BPSG

                                Insitu doped poly

                        Poly and amorphous silicon

  • Loading

        Cantilever load beam options:

        High purity silicon carbide paddle

                                    or

        Dual rods sheathed in quartz glass

        Push/puller or manual sled options:

              Tubing or rods

                                    or 

              Quartz glass tube with ceramic reinforcement 

        Peripheral quartz components for manual loading

 

         Click here for information on loaders

 

  • Gas or Gas/Vacuum Fluid Delivery System

        Configured to process-specific gas schematic

        Mass flow controller flow devices    

        Vacuum source delivery system when applied to:

                        TEOS, PTEOS, BPTEOS

        Injector diverter balancing valves when required

        Interconnect main supply lines to flanges

 

        Click here for information on gas systems

 

  • Vacuum System

        Sized according to process requirements

        Vacuum pump

                Roots Blower when applicable

                May be rotary vane pump or dry pump

        Vacuum lines

        Optional closed loop pressure control

           Associated vacuum valves

           N2 pump purge when applicable